Plasma Emission Spectroscopy and Chemical Analysis of Amorphous Hydrogenated Carbon

  • Chang Soo Park
  • , Jeffrey R. Bodart
  • , He-Xiang Han
  • , Bernard J. Feldman

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
JournalMRS Proceedings
Volume68
DOIs
StatePublished - Jan 1 1986

Disciplines

  • Inorganic Chemistry
  • Materials Science and Engineering

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