@article{44d45c46ee0b492d9b68a0a5a96e842f,
title = "Plasma Emission Spectroscopy and Chemical Analysis of Amorphous Hydrogenated Carbon",
author = "Park, \{Chang Soo\} and Bodart, \{Jeffrey R.\} and He-Xiang Han and Feldman, \{Bernard J.\}",
note = "Plasma Emission Spectroscopy and Chemical Analysis of Amorphous Hydrogenated Carbon - Volume 68 - Chang Soo Park, Jeffrey R. Bodart, He-Xiang Han, Bernard J. Feldman",
year = "1986",
month = jan,
day = "1",
doi = "10.1557/PROC-68-199",
language = "American English",
volume = "68",
journal = "MRS Proceedings",
}