Plasma Emission Spectroscopy and Chemical Analysis of Amorphous Hydrogenated Carbon

Chang Soo Park, Jeffrey R. Bodart, He-Xiang Han, Bernard J. Feldman

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
JournalMRS Proceedings
Volume68
DOIs
StatePublished - Jan 1 1986

Disciplines

  • Inorganic Chemistry
  • Materials Science and Engineering

Cite this