Microcrystalline Cubic Boron Nitride/Amorphous Hydrogenated Boron Nitride Mixed Phase Thin Films

Shu-Han Lin, Bernard J. Feldman

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
JournalMRS Proceedings
Volume358
DOIs
StatePublished - Jan 1 1994

Disciplines

  • Metallurgy
  • Inorganic Chemistry
  • Materials Science and Engineering

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