Measuring Local Thickness Through Small-Tilt Fringe Visibility

E Mandell, P Fraundorf, W Qin

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
JournalMicroscopy and Microanalysis
Volume11
DOIs
StatePublished - Aug 1 2005

Disciplines

  • Analytical Chemistry
  • Optics
  • Materials Science and Engineering

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