Hardness measurements of anode and cathode mounted, plasma deposited amorphous hydrogenated carbon

TY - JOUR

T1 - Hardness measurements of anode and cathode mounted, plasma deposited amorphous hydrogenated carbon

AU - Lin, Shu Han

AU - Feldman, Bernard J.

AU - Li, Dong

AU - Chung, Yip Wah

AU - Wong, Ming Show

AU - Sproul, William D.

N1 - Hardness Measurements on Anode and Cathode Mounted, Plasma Deposited Amorphous Hydrogenated Carbon - Volume 349 - Shu-Han Lin, Bernard J. Feldman, Dong Li, Yip-Wah Chung, Mingshow Wong, William D. Sproul

PY - 1994/1/1

Y1 - 1994/1/1

UR - http://journals.cambridge.org/abstract_S1946427400364089

U2 - 10.1557/PROC-349-519

DO - 10.1557/PROC-349-519

M3 - Article

VL - 349

JO - MRS Proceedings

JF - MRS Proceedings

ER -