Electron Collisions in the Plasma as a Major Factor in the Growth of Amorphous Hydrogenated Carbon

S. Lin; Bernard J. Feldman

doi:10.1557/PROC-270-463

Electron Collisions in the Plasma as a Major Factor in the Growth of Amorphous Hydrogenated Carbon

University of Missouri-St. Louis

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	MRS Proceedings
Volume	270
DOIs	https://doi.org/10.1557/PROC-270-463
State	Published - Jan 1 1992

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Inorganic Chemistry
Materials Science and Engineering

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Electron Collisions in the Plasma as a Major Factor in the Growth of Amorphous Hydrogenated Carbon

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