Amorphous silicon-hydrogen-fluorine-oxygen alloys

Bernard J. Feldman

doi:10.1016/0022-3093(80)90612-2

Amorphous silicon-hydrogen-fluorine-oxygen alloys

University of Missouri-St. Louis

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	Journal of Non-crystalline Solids
DOIs	https://doi.org/10.1016/0022-3093(80)90612-2
State	Published - Jan 1 1980

Disciplines

Inorganic Chemistry
Materials Science and Engineering

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title = "Amorphous silicon-hydrogen-fluorine-oxygen alloys",

author = "Feldman, \{Bernard J.\}",

note = "Amorphous silicon-hydrogen-fluorine-oxygen alloys have been grown by the plasma deposition of a SiF4/H2 gas mixture. The composition and optical prope...",

year = "1980",

month = jan,

day = "1",

doi = "10.1016/0022-3093(80)90612-2",

language = "American English",

journal = "Journal of Non-crystalline Solids",

}

TY - JOUR

T1 - Amorphous silicon-hydrogen-fluorine-oxygen alloys

AU - Feldman, Bernard J.

N1 - Amorphous silicon-hydrogen-fluorine-oxygen alloys have been grown by the plasma deposition of a SiF4/H2 gas mixture. The composition and optical prope...

PY - 1980/1/1

Y1 - 1980/1/1

UR - https://www.sciencedirect.com/science/article/pii/0022309380906122

U2 - 10.1016/0022-3093(80)90612-2

DO - 10.1016/0022-3093(80)90612-2

M3 - Article

JO - Journal of Non-crystalline Solids

JF - Journal of Non-crystalline Solids

ER -

Amorphous silicon-hydrogen-fluorine-oxygen alloys

Disciplines

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